| 摘要 |
PURPOSE: A low electric power vacuum pump system of semiconductor manufacturing equipment is provided to prevent the power loss according to an unnecessary operation of a booster pump by stopping the operation of the booster pump in an idle state. CONSTITUTION: A main controller(110) controls the transmission of the operation of pump signal. The pump controller transmits the pump operation signal transmitted from the main controller to a booster pump driving circuit(130) and a dry pump driving circuit(140). An idle signal line(118) is included between the main controller and the pump controller.
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