| 摘要 |
PURPOSE: A power supply device for plasma is provided to stably perform the operation of supplying power to a plasma device by respectively separating the inductor coil of a main transformer. CONSTITUTION: A 3-phase power supply unit(110) supplies a three-phase AC voltage. An initial transformer is connected to the 3-phase power supply unit. The initial transformer forms an initial voltage by boosting the AC voltage. A rectifier(140) is connected to the initial transformer. The rectifier rectifies the initial voltage to a direct current voltage. The initial transformer forms the initial voltage by boosting the AC voltage to somewhere between 10kV and 20kV. The initial transformer, electrically connected to a cathode and a first anode of the plasma device, supplies the initial voltage. |
