发明名称 A PATTERNED ASSEMBLY FOR MANUFACTURING A SOLAR CELL AND A METHOD THEREOF
摘要 Apparatuses and methods for manufacturing a solar cell are disclosed. In a particular embodiment, the solar cell may be manufactured by disposing a solar cell in a chamber having a particle source; disposing a patterned assembly comprising an aperture and an assembly segment between the particle source and the solar cell; and selectively implanting first type dopants traveling through the aperture into a first region of the solar cell while minimizing introduction of the first type dopants into a region outside of the first region.
申请公布号 KR20100059954(A) 申请公布日期 2010.06.04
申请号 KR20107007511 申请日期 2008.09.08
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 SULLIVAN PAUL;NUNAN PETER;WALTHER STEVEN R.
分类号 H01L31/18;H01L31/042 主分类号 H01L31/18
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