发明名称 DICING DIE-BONDING FILM AND PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE
摘要 PURPOSE: A dicing die-bonding film and a method for manufacturing a semiconductor device are provided to smoothly perform a dicing process by securely maintaining an object like a semiconductor wafer. CONSTITUTION: An adhesive layer of a dicing film is made of a thermal expansible adhesive including an acrylic polymer A and a foaming agent. The acrylic polymer A includes an acrylic acid ester of 50 weight% or more marked as CH2= CHCOOR, a monomer including a hydroxyl group of 1 weight% to 30 weight% and the monomer composition without the monomer containing a carboxylic group. A thermal expansible adhesive layer(1b) has a surface free energy less than 30mJ/m^2. A die-bonding film(3) is made of a resin composition including an epoxy resin.
申请公布号 KR20100059734(A) 申请公布日期 2010.06.04
申请号 KR20090115250 申请日期 2009.11.26
申请人 NITTO DENKO CORPORATION 发明人 KAMIYA KATSUHIKO;OOTAKE HIRONAO;MATSUMURA TAKESHI;MURATA SHUUHEI
分类号 H01L21/78 主分类号 H01L21/78
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