| 摘要 |
<p>PURPOSE: A wafer sensing apparatus of a wafer transfer system and an interlocking method using the same are provided to prevent the process accident by the misalignment of the wafer in advance by sensing the number and an alignment status of a wafer held by a retainer in a transfer stage. CONSTITUTION: A sensor moving shaft(50) is located on surface a retainer fixing bar(24). The sensor moving shaft reciprocates according to the retainer fixing bar. The driving unit transfers the driving force to the sensor moving shaft. A wafer sensor(60) comprises a lighting-emitting area(61) and a photo diode(62). The wafer sensor transmits the sensitivity signal of the light.</p> |
