发明名称 |
AIR VENT TUBE AND SYSTEM FOR SUPPLYING CHEMICAL HAVING THE SAME |
摘要 |
PURPOSE: An air vent tube and a chemical supplying system having the same are provided to reduce the fluctuation of chemical by discharging the chemical through an air vent tube comprising a plurality of vent holes. CONSTITUTION: An air vent tube(170) discharges the bubble and chemical to a chemical storage tank. The air vent tube comprises an outlet discharging the bubble and chemical(120) and a vent hole(180). The vent hole discharges the bubble and the chemical. A chemical supplier(160) supplies the chemical solution. The chemical storage tank is supplied with the chemical from the chemical supplier and stores the chemical.
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申请公布号 |
KR20100059459(A) |
申请公布日期 |
2010.06.04 |
申请号 |
KR20080118240 |
申请日期 |
2008.11.26 |
申请人 |
SEMES CO., LTD. |
发明人 |
KANG, BYUNG CHUL;OH, RAE TAEK;JUNG, EUN SUN |
分类号 |
H01L21/302;H01L21/00 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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