发明名称 AIR VENT TUBE AND SYSTEM FOR SUPPLYING CHEMICAL HAVING THE SAME
摘要 PURPOSE: An air vent tube and a chemical supplying system having the same are provided to reduce the fluctuation of chemical by discharging the chemical through an air vent tube comprising a plurality of vent holes. CONSTITUTION: An air vent tube(170) discharges the bubble and chemical to a chemical storage tank. The air vent tube comprises an outlet discharging the bubble and chemical(120) and a vent hole(180). The vent hole discharges the bubble and the chemical. A chemical supplier(160) supplies the chemical solution. The chemical storage tank is supplied with the chemical from the chemical supplier and stores the chemical.
申请公布号 KR20100059459(A) 申请公布日期 2010.06.04
申请号 KR20080118240 申请日期 2008.11.26
申请人 SEMES CO., LTD. 发明人 KANG, BYUNG CHUL;OH, RAE TAEK;JUNG, EUN SUN
分类号 H01L21/302;H01L21/00 主分类号 H01L21/302
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