| 摘要 |
PURPOSE: A bake chamber is provided to uniformly maintain inner temperature of a bake process chamber by discharging exhaust gas through a discharging channel while surrounding a bake process chamber. CONSTITUTION: A bake process chamber(120) comprises a plate(110) in which a substrate(1) is stored. The bake process chamber forms a space in which a bake process is executed. A bake storing chamber(140) stores the bake process chamber. The bake storing chamber forms a discharging channel discharging the exhaust gas. The bake process chamber discharges the exhaust gas inside the chamber to the outside of a lid. The bake storing chamber comprises a storing container and a lid opening and closing the storing container.
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