| 摘要 |
PURPOSE: A substrate support unit and a substrate process method using the same are provided to reduce a load delivered from a spin head to a drive material by supporting the spin head using magnetism. CONSTITUTION: A substrate is placed on a spin head(110). A drive material(120) drives the spin head. A load reduction material(130) reduces the load delivered from the spin head to the drive material. The load reduction material includes a first magnetic material(131) and a second magnetic material(133). The first magnetic material is installed on the spin head. The second magnetic material is arranged under the first magnetic material.
|
