| 摘要 |
PURPOSE: A floating body cell and a manufacturing method thereof are provided to improve a punch property of a memory cell by sufficiently maintaining the thickness of the floating body. CONSTITUTION: A gate oxidation film and a gate are successively formed on a silicon substrate. A first spacer(130) is formed on the outer sidewall of the gate. A trench is formed by removing a part of the silicon substrate exposed between gates. A second spacer is formed on the outer sidewall of the gate and the inner sidewall of the trench. A part of the silicon substrate of a lower trench exposed between the second spacer is oxidized and a cell isolation film is formed. The second spacer is selectively removed. A poly-silicon(170) is filled between the gates and inside the trench.
|
