| 摘要 |
PURPOSE: A substrate transfer apparatus is provided to reduce the tact time of a substrate by employing a transfer unit with a two-stage shuttle structure. CONSTITUTION: A substrate transfer apparatus comprises a first substrate transfer assembly(100) and a second substrate transfer assembly(200). The first substrate transfer assembly transfers a substrate from a first area to a second area of a first section. The second substrate transfer assembly receives the substrate from the second area and transfers the substrate to a third area of a second section which is subsequent to the first section. After transferring the substrate to the second part in the second area, the first substrate transfer assembly returns to the first area of the first section, and then the second substrate transfer assembly transfers the substrate to the third area of the second section.
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