| 摘要 |
PURPOSE: A substrate transport apparatus is provided to reduce a horizontal impact applied to a substrate being transported in an upright position. CONSTITUTION: A substrate transport apparatus comprises a transport unit, a supporting part(122), a first shock-absorbing unit(121), and a second shock-absorbing unit. The supporting part is installed on the top of the transport unit and supports a substrate. The first shock-absorbing unit connects the supporting part to the transport unit and reduces a horizontal impact applied to the supporting part. The first shock-absorbing unit is an elastic member vertically installed in the transport unit. The second shock-absorbing unit is installed between the transport unit and the first shock-absorbing unit and reduces a vertical impact applied to the supporting part.
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