| 摘要 |
PURPOSE: A substrate transport apparatus is provided to reduce an external impact by guiding a substrate support plate to be easily ascend and descend. CONSTITUTION: A substrate transport apparatus comprises a transport unit, a frame(110), a support plate(130), a supporting part(120), a floating unit, and a guide member(131). The frame is fixed to the transport unit. The support plate is installed horizontally inside the frame. The supporting part is installed on the top of the support plate and supports a substrate. The floating unit provides floating pressure to the support plate within the frame. The guide member, such as rollers in contact with the inner wall of the frame, is installed on an end of the support plate and guides the elevation of the support plate.
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