| 摘要 |
PURPOSE: An apparatus for applying a chemical is provided to prevent the damage of a nozzle due to a foreign material by stopping the movement of the nozzle through a transferring unit in case of sensing the foreign material. CONSTITUTION: A nozzle(100) applies a chemical on a substrate(G). A transferring unit(200) is connected with the nozzle. The transferring unit transfers the nozzle to a first direction. A foreign material sensor(400) is connected with the transferring unit. The foreign material sensor transmits sensing signal to the transferring unit in case of sensing a foreign material. The transferring unit stops the movement of the nozzle based on the sensing signal.
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