FIBER-BASED INTERFEROMETER SYSTEM FOR MONITORING AN IMAGING INTERFEROMETER

摘要

Apparatus include a microscope including an objective and a stage for positioning a test object relative to the objective, the stage being moveable with respect to the objective, and a sensor system including a sensor light source, an interferometric sensor configured to receive light from the sensor light source, to introduce an optical path difference (OPD) between first and second portions of the light, the OPD being related to a distance between the objective lens and the stage, and to combine the light portions to provide output light, a detector for detecting the output light from the interferometric sensor, a fiber waveguide for directing light between the sensor light source, the interferometric sensor and the detector, a tunable optical cavity between the sensor light source and the interferometric sensor, and an electronic controller configured to determine information related to the OPD based on the detected output light.