发明名称 |
VERTICAL TYPE APPARATUS FOR TRANSFERRING A SUBSTRATE |
摘要 |
PURPOSE: A vertical type substrate conveyor apparatus is provided to prevent the dropping accident of a substrate by including a dropping preventive unit. CONSTITUTION: A grip conveyor unit(100) compulsorily transfers a substrate. An secondary conveyor unit(200) is adjacently arranged to the grip conveyor unit. The secondary conveyor unit supports the substrate. A dropping preventive unit(300) prevents the escaping the substrate from a conveyor path. The dropping preventive unit includes a contact support roller, a roller support bracket and an actuator.
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申请公布号 |
KR20100058149(A) |
申请公布日期 |
2010.06.03 |
申请号 |
KR20080116866 |
申请日期 |
2008.11.24 |
申请人 |
SFA ENGINEERING CORP.;CFA ENGINEERING CORP. |
发明人 |
LEE, GYEONG NAM;JANG, JAE SIG;PARK, SOON PIL |
分类号 |
H01L21/68;B65G53/00 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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