发明名称 VERTICAL TYPE APPARATUS FOR TRANSFERRING A SUBSTRATE
摘要 PURPOSE: A vertical type substrate conveyor apparatus is provided to prevent the dropping accident of a substrate by including a dropping preventive unit. CONSTITUTION: A grip conveyor unit(100) compulsorily transfers a substrate. An secondary conveyor unit(200) is adjacently arranged to the grip conveyor unit. The secondary conveyor unit supports the substrate. A dropping preventive unit(300) prevents the escaping the substrate from a conveyor path. The dropping preventive unit includes a contact support roller, a roller support bracket and an actuator.
申请公布号 KR20100058149(A) 申请公布日期 2010.06.03
申请号 KR20080116866 申请日期 2008.11.24
申请人 SFA ENGINEERING CORP.;CFA ENGINEERING CORP. 发明人 LEE, GYEONG NAM;JANG, JAE SIG;PARK, SOON PIL
分类号 H01L21/68;B65G53/00 主分类号 H01L21/68
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