发明名称 ALUMINUM NITRIDE SINTERED BODY, METHOD FOR PRODUCING THE SAME AND ELECTROSTATIC CHUCK USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered body containing no samarium and having performances equivalent to an aluminum nitride sintered body containing samarium. <P>SOLUTION: The method for producing the aluminum nitride sintered body contains (a) a process for preparing a mixed powder containing AlN, 2-10 pts.wt. Eu<SB>2</SB>O<SB>3</SB>to 100 pts.wt. AlN, 2-10 Al<SB>2</SB>O<SB>3</SB>to Eu<SB>2</SB>O<SB>3</SB>in molar ratio and 0.05-1.2 TiO<SB>2</SB>to Al<SB>2</SB>O<SB>3</SB>in molar ratio and containing no Sm, (b) a process for preparing a formed body by using the mixed powder and (c) a process for performing a hot press firing in a vacuum or inert gas atmosphere at firing the formed body. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010120822(A) 申请公布日期 2010.06.03
申请号 JP20080297438 申请日期 2008.11.21
申请人 NGK INSULATORS LTD 发明人 TERATANI NAOMI;HAYASE TORU;KATSUTA YUJI
分类号 C04B35/581;H01L21/683;H02N13/00 主分类号 C04B35/581
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