| 摘要 |
PROBLEM TO BE SOLVED: To widen a measuring range of each measuring means, in a shape measuring device including a plurality of measuring means. SOLUTION: The shape measuring device includes three kinds of probes, namely, a laser probe 17, an image probe 18 and a touch probe 19. A rotation axis moving part 13B is supported by a tilting shaft support part 13A rotatably around a tilting shaft A1, and a specimen 2 installed on a rotary table 13C can be tilted with respect to each probe by tilting the rotation axis moving part 13B around the tilting shaft A1. Each probe is arranged so that the left side face in the figure of each probe becomes approximately parallel to the tilting shaft A1. This invention can be applied to, for example, the shape measuring device. COPYRIGHT: (C)2010,JPO&INPIT
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