发明名称 THREE-DIMENSIONAL ARCHITECTURE FOR INTEGRATION OF CMOS CIRCUITS AND NANO-MATERIAL IN HYBRID DIGITAL CIRCUITS
摘要 A hybrid CMOL stack enables more efficient design of CMOS logical circuits. The hybrid CMOL structure includes a first substrate having a CMOS device layer on the substrate, a first interconnect layer with interface pins over the CMOS device layer of the first substrate, a first array of nanowires connected to the interface pins of the first interconnect layer, a layer of nanowire junction material over the first array of nanowires, a second array of nanowires over the nanowire junction material, a second interconnect layer having interface pins disposed over the second array of nanowires, the interface pins being connected to the second array of nanowires, and a second substrate, the second substrate including a second CMOS device layer disposed over the second interconnect layer.
申请公布号 US2010133587(A1) 申请公布日期 2010.06.03
申请号 US20080529403 申请日期 2008.03.27
申请人 THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK 发明人 WANG WEI
分类号 H01L27/092;H01L21/8234 主分类号 H01L27/092
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