发明名称 DIFFRACTION ORDER MEASUREMENT
摘要 The present invention relates to an integrated mastering system and a method for manufacturing master discs for optical media. The system according to the invention comprises means for recording information on a master disc including means for applying a material layer to a master disc, a laser beam recorder for illuminating the material layer in a desired pattern based on the information to be recorded, means for developing the material layer, means for determining the quality of the developed layer based on measurement of a light beam diffracted by the pattern recorded on the master disc, and means for controlling the means for recording on the basis of the quality of the master disc. According to the method of the present invention, the quality of the developed layer of a master disc is determined and the mastering process settings of a subsequent master disc are controlled.
申请公布号 US2010136468(A1) 申请公布日期 2010.06.03
申请号 US20080449781 申请日期 2008.01.28
申请人 WIJN JOSEPHUS MARINUS;FRANSE JELM 发明人 WIJN JOSEPHUS MARINUS;FRANSE JELM
分类号 G03F7/20;C23C14/34;G03B27/52 主分类号 G03F7/20
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