PLASMA REACTION APPARATUS HAVING CORN TYPE 3 DIMENSIONAL HELIX INDUCTIVE COIL

摘要

PURPOSE: A plasma reaction apparatus having corn type 3 dimensional helix inductive coil is provided to enhance the uniformity of a plasma ion density by adopting 3D helix inductive coil of cone-shape in a plasma system. CONSTITUTION: A chamber(300) comprises a chamber body(301) for keeping the vacuum condition and a dielectric window(302) applied with the RF magnetic field created from a multiple inductive coil group(312). The chamber comprises a gas injector for injecting the reaction gas to the inside of the chamber and a bottom electrode supporting wafer.