发明名称 |
METHOD AND APPARATUS FOR PREPARING ULTRAPURE SILICON |
摘要 |
A method is described for producing high-purity silicon by thermally decomposing a silicon compound which is mixed with a carrier gas for the decomposition process, said carrier gas having a temperature at which the silicon compound is thermally decomposed. A reactor and a system in which such a method can be carried out are also described.
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申请公布号 |
CA2744872(A1) |
申请公布日期 |
2010.06.03 |
申请号 |
CA20092744872 |
申请日期 |
2009.11.27 |
申请人 |
SCHMID SILICON TECHNOLOGY GMBH |
发明人 |
PETRIK, ADOLF;SCHMID, CHRISTIAN;HAHN, JOCHEM |
分类号 |
C01B33/027;B01J19/24;C01B33/029;C01B33/03 |
主分类号 |
C01B33/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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