| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of controlling a treating liquid by a treating liquid apparatus, with which occurrence of bubbles in the treating liquid is prevented by controlling a liquid feed/discharge in a workpiece transporting path in a box tank. SOLUTION: The treating liquid apparatus is provided with: an immersing tank 22 always storing the treating liquid; an intermediate delivery tank, for example, the box tank 23 arranged adjacently to the immersing tank 22 and having the workpiece transporting path 41; a liquid storage tank 43 arranged below the box tank 23; a liquid discharge pipe 45 extending from the liquid discharge port 46 of the workpiece transporting path 41 to the liquid storage tank 43; an on-off valve 52 for liquid discharge pipe 45; and a control structure 54 controlling the on-off valve 52. In the box tank 23, liquid feeding from a liquid feeding port 62 to the workpiece transporting path 41 and liquid discharging from the discharge port 46 to the liquid storage tank 43 are alternately carried out when the workpiece is passed, and when discharging the liquid, the on-off valve 52 is controlled to be opened or closed so that the liquid in the workpiece transporting path 41 remains at a position near the upper part of the upper end 62a of the liquid feeding port 62. COPYRIGHT: (C)2010,JPO&INPIT |
