发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device in which normal electric continuity between wiring layers is secured. SOLUTION: The semiconductor device includes at least two wiring layers on a substrate or in a surface layer of the substrate, and also includes a silicon carbide layer between the lower-layer wiring layer and upper-layer wiring layer of the two wiring layers when the lower-layer wiring layer is made of silicon. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010123866(A) 申请公布日期 2010.06.03
申请号 JP20080298163 申请日期 2008.11.21
申请人 SHARP CORP 发明人 TAJIRI MASAYUKI
分类号 H01L29/417;H01L21/283;H01L21/3205;H01L21/336;H01L21/768;H01L23/52;H01L23/522;H01L29/78;H01L29/786 主分类号 H01L29/417
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