| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam generation device and a transport device generating ion beams of sufficiently high current density regardless of its low energy and transporting the beams over a long distance with little loss. SOLUTION: The beam generation device includes an ion source 10 including a plasma electrode 11 and a beam lead-out electrode 12 with a multiple lead-out port through which beams of high energy and high current density are led out, a first deceleration electrode 20 with a multiple port structure, an electrostatic lens 30 with a multiple port structure for collecting the beams, and a second deceleration electrode 40 with a multiple port structure for controlling the final energy of the beams while decelerating the beams again. The beam transport device is a device for transporting the beams generated by the generation device. Ion beam lenses 50, each having a multiple port structure, are repetitively disposed at regular intervals downstream of the second deceleration electrode 40 to reduce the loss due to spreading by space charge of the beams while the beams are moving. COPYRIGHT: (C)2010,JPO&INPIT
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