| 摘要 |
There is provided a capacitor having variable capacitance, which forms different capacitances according to a control signal by applying a switch to a metal-oxide-metal (MOM) structure plate capacitor using a CMOS process. The capacitor includes a stack structure including a plurality of metal layers including a first metal layer, and a plurality of dielectric layers respectively interposed between the plurality of metal layers, and a switch part including at least one switch having one side connected to at least one metal layer among the plurality of metal layers other than the first metal layer. The first metal layer and the other side of the switch serve as both terminals of the capacitor, and at least two capacitances are provided between both terminals of the capacitor upon controlling a short/open of the switch. |
