| 摘要 |
PROBLEM TO BE SOLVED: To more accurately cancel displacement of an inspection point, and also inspect more unit substrates by once simultaneously. SOLUTION: An inspection fixture provides an inspection fixture head for inspecting a wiring pattern of each unit inspection substrate on a sheet substrate. The inspection fixture head includes a plurality of the inspection probes for conducting the inspection of the wiring pattern by contacting corresponding to the inspection point on the wiring pattern of the unit inspection substrate, a probe head holding the plurality of the inspection probes, a base holding the probe head, a first moving means which moves the probe head into a first direction at a plane parallel to the plane of the unit inspection substrate, and is mounted on the base, a second moving means which moves the probe head into a second direction different to the first direction at the plane parallel to the plane of the unit inspection substrate, and is mounted on the base. By operating one or both of the first moving means and the second moving means, the displacement corresponding to the plurality of the inspection probes and the inspection points can be adjusted. COPYRIGHT: (C)2010,JPO&INPIT |
