发明名称 |
MICROBOLOMETER INFRARED DETECTOR ELEMENTS AND METHODS FOR FORMING SAME |
摘要 |
Microbolometer infrared detector elements that may be formed and implemented by varying type/s of precursors used to form amorphous silicon-based microbolometer membrane material/s and/or by varying composition of the final amorphous silicon-based microbolometer membrane material/s (e.g., by adjusting alloy composition) to vary the material properties such as activation energy and carrier mobility. The amorphous silicon-based microbolometer membrane material/s materials may include varying amounts of one or more additional and optional materials, including hydrogen, fluorine, germanium, n-type dopants and p-type dopants.
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申请公布号 |
US2010133536(A1) |
申请公布日期 |
2010.06.03 |
申请号 |
US20060498939 |
申请日期 |
2006.08.03 |
申请人 |
SYLLAIOS ALTHANASIOS J;SCHIMERT THOMAS R;TAYLOR MICHAEL F |
发明人 |
SYLLAIOS ALTHANASIOS J.;SCHIMERT THOMAS R.;TAYLOR MICHAEL F. |
分类号 |
H01L31/0376;H01L21/50;H01L31/18 |
主分类号 |
H01L31/0376 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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