| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gate valve which can simply replace a seal member for sealing between a process chamber and a valve housing without separating the valve housing from the process chamber. Ž<P>SOLUTION: In a gate valve 1, a first side wall 7a of a valve housing 7 connected to a process chamber 2 is provided with a communicating hole 5 communicating with the process chamber 2 and a seal member 13 for sealing between the first side wall 7a, and a chamber wall 2a of the process chamber 2 and the communicating hole 5 is opened/closed with a valve plate 6 arranged within a valve chamber 9. The communicating hole 5 and seal member 13 are formed in a sheet member 14 detachable from the first side wall 7a, and the sheet member 14 can be removed outward from the valve housing 7 through an opening 21 of upper end of the valve housing 7 from the valve chamber 9. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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