发明名称 TECHNIQUE FOR THE GROWTH OF PLANAR SEMI-POLAR GALLIUM NITRIDE
摘要 A method for growing planar, semi-polar nitride film on a miscut spinel substrate, in which a large area of the planar, semi-polar nitride film is parallel to the substrate's surface. The planar films and substrates are: (1) {10 11} gallium nitride (GaN) grown on a {100} spinel substrate miscut in specific directions, (2) {10 13 } gallium nitride (GaN) grown on a {110} spinel substrate, (3) {11 22} gallium nitride (GaN) grown on a {1 100} sapphire substrate, and (4) {10 13} gallium nitride (GaN) grown on a {1 100} sapphire substrate
申请公布号 US2010133663(A1) 申请公布日期 2010.06.03
申请号 US20100697961 申请日期 2010.02.01
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 BAKER TROY J.;HASKELL BENJAMIN A.;FINI PAUL T.;DENBAARS STEVEN P.;SPECK JAMES S.;NAKAMUA SHUJI
分类号 H01L29/04;H01L21/20;H01L33/00 主分类号 H01L29/04
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