发明名称 SCANNING PROBE EPITAXY
摘要 A dual tip probe for scanning probe epitaxy and a method of forming the dual tip probe are disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The first tip can remain in contact with a substrate during writing and provide in situ characterization of the substrate and or structures written, while the second tip can perform in non-contact mode to write and synthesis nanostructures. This feature can allow the dual tip probe to detect errors in a printed pattern using the first tip and correct the errors using the second tip.
申请公布号 WO2010011397(A3) 申请公布日期 2010.06.03
申请号 WO2009US43864 申请日期 2009.05.13
申请人 NORTHWESTERN UNIVERSITY;MIRKIN, CHAD, A.;LIU, CHANG;WANG, YUHUANG;BRAUNSCHWEIG, ADAM, B.;LIAO, XING;GIAM, LOUISE, R.;LEE, BYUNG, YANG 发明人 MIRKIN, CHAD, A.;LIU, CHANG;WANG, YUHUANG;BRAUNSCHWEIG, ADAM, B.;LIAO, XING;GIAM, LOUISE, R.;LEE, BYUNG, YANG
分类号 G01Q70/10;G03F7/00 主分类号 G01Q70/10
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