发明名称 Nonvolatile memory device and method for fabricating the same
摘要 A three-dimensional nonvolatile memory device and a method for fabricating the same include a semiconductor substrate, a plurality of active pillars, a plurality of gate electrodes, and a plurality of supporters. The semiconductor substrate includes a memory cell region and a contact region. The active pillars extend in the memory cell region perpendicularly to the semiconductor substrate. The gate electrodes intersect the active pillars, extend from the memory cell region to the contact region and are stacked on the semiconductor substrate. The supporters extend in the contact region perpendicularly to the semiconductor substrate to penetrate at least one or more of the gate electrodes.
申请公布号 US2010133599(A1) 申请公布日期 2010.06.03
申请号 US20090592869 申请日期 2009.12.03
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHAE SOODOO;LEE MYOUNGBUM;MOON HUICHANG;KIM HANSOO;KIM JINGYUN;KIM KIHYUN;CHOI SIYOUNG;CHO HOOSUNG
分类号 H01L29/788 主分类号 H01L29/788
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