| 摘要 |
PROBLEM TO BE SOLVED: To provide a tactile sensor for simply decomposing a load into a compression force and a shear force, and its manufacturing method. SOLUTION: The tactile sensor 1 can decompose the load F1 into the shear force F1s and the compression force F1c, can detect the load F1, and includes: a shear force detecting section 2 having a shear force detecting front electrode layer 20, a shear force detecting back electrode layer 21 and a shear force detecting dielectric layer 22, and detecting a change in the shear force F1s by utilizing a change in an effective electrode area S1 by the shear force F1s; a compression force detecting section 3 having a compression force detecting front electrode layer 30, a compression force detecting back electrode layer 31 and a compression force detecting dielectric layer 32, and detecting a change in the compression force F1c by utilizing a change in a layer thickness T1 of the compression force detecting dielectric layer 32 by the compression force F1c; and an insulating layer 4. COPYRIGHT: (C)2010,JPO&INPIT |
