| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing tool and a polishing apparatus, which can polish an object to be polished with high accuracy and at high speed. Ž<P>SOLUTION: A ring-shaped strut 33 is provided substantially intermediately between the outer diameter and the inner diameter of a grinding stone holding member 28. An ultrasonic vibrator 27a is joined on the lower surface of the grinding stone holding member 28. Alternatively, an ultrasonic vibrator 27b is joined on the outer circumferential part of the ring-shaped strut 33, and an ultrasonic vibrator 27c is joined on the lower surface side of the grinding stone holding member 28 on the inner circumferential part of the ring-shaped strut 33. Further, the upper surface of the grinding stone holding member 28 is fixed and held on a flange 19 in a rotating shaft 13a. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
