发明名称 MULTI-SCALE CANTILEVER STRUCTURES HAVING NANO SIZED HOLES AND METHOD OF PREPARING THE SAME
摘要 Provided are a multi-scale cantilever structure having nano-sized holes prepared by anodic oxidation and a method of preparing the same. The multi-scale cantilever structure is prepared using anodic oxidation and electro-polishing so that a manufacturing process is simple and a manufacturing cost is inexpensive. In addition, the multi-scale cantilever structure has a porous structure having a plurality of nano-sized holes inside thereof, and thus a surface area of the cantilever structure can be maximized. Therefore, when the cantilever structure is used in a sensor, the sensor can have improved sensitivity and selectivity.
申请公布号 US2010136490(A1) 申请公布日期 2010.06.03
申请号 US20080245940 申请日期 2008.10.06
申请人 POSTECH FOUNDATION;POSTECH ACADEMY-INDUSTRY FOUNDATION 发明人 LEE JUNG HYUN;LEE PYUNG SOO;LEE KUN HONG;SHIN NAYOUNG
分类号 G03F7/20 主分类号 G03F7/20
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