发明名称 AUTOMATED WAREHOUSE FOR CLEAN ROOM AND METHOD FOR STORING ARTICLES IN AUTOMATED WAREHOUSE
摘要 PROBLEM TO BE SOLVED: To prevent stored articles from being contaminated using a small amount of clean air. SOLUTION: An article loading device is installed on the lift of a stacker crane. The article on the lift is surrounded by a case, the clean air is supplied from a first fan filter unit into the case, and the entry of the air in a traveling path into the case is cut out. The clean air is supplied from a second fan filter unit into a rack and the air in the traveling path is prevented from intruding into the inside of the rack. The inside of the case and the inside of a rack are thus locally kept in a high-degree of cleanliness. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010120768(A) 申请公布日期 2010.06.03
申请号 JP20080297821 申请日期 2008.11.21
申请人 MURATA MACHINERY LTD 发明人 HAYASHI TAKAO
分类号 B65G1/00;B65G1/04;H01L21/673 主分类号 B65G1/00
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