| 摘要 |
PROBLEM TO BE SOLVED: To secure a gas flow rate of an electrostatic chuck having its surface coated with a ceramic coating film while preventing arcing from occurring by improving insulation of a gas flow passage. SOLUTION: The electrostatic chuck 10 includes a metallic base 20 provided as a through space or part thereof to a base hole 21, a ceramic sintered porous body 30 coming into contact with an internal surface of the base hole 21 and having an insulating property, and the ceramic coating film 40 covering a principal surface 22 that the metallic base 20 and the ceramic sintered porous body 30 form and provided with a film hole 42 as a through hole reaching the ceramic sintered porous body 30 from the surface, wherein a structure of the ceramic sintered porous body 30 and the film hole 42 form the gas flow passage. Consequently, the adhesiveness between the film and the porous body is improved to prevent arcing in the gas flow passage from occurring. Further, no gap is formed in the base hole 21 and the arcing can be prevented from occurring. COPYRIGHT: (C)2010,JPO&INPIT |
