发明名称 METHOD FOR MANUFACTURING THIN FILM SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film semiconductor device which can form a semiconductor layer having high shape accuracy and thereby can obtain a thin film semiconductor device having excellent characteristics. Ž<P>SOLUTION: An organic semiconductor solution L1 and a polymer solution L2 are individually supplied to the surface of a substrate 1 to form a mixed solution layer 5a of the organic semiconductor solution L1 and the polymer solution L2. A semiconductor layer 5 is formed by drying the mixed solution layer 5a. The organic semiconductor solution L1 and the polymer solution L2 are supplied to the surface of the substrate 1 by a printing method such as an ink-jet method. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010123778(A) 申请公布日期 2010.06.03
申请号 JP20080296510 申请日期 2008.11.20
申请人 SONY CORP 发明人 FUKUDA TOSHIO
分类号 H01L21/336;H01L21/368;H01L29/786;H01L51/05;H01L51/40;H01L51/50 主分类号 H01L21/336
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