| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for efficiently recovering lapping abrasives, in a reutilizable state, from a lapping agent after use in lapping. SOLUTION: A used lapping agent 7 contains a lap debris 9 and at least one type of abrasives 8. A lapping agent separator 10 for recovering the lapping agent 7 comprises a base 11, an inclined plate 12 having one end pivoted on the base 11, and an ultrasonic vibrating device 15 comprising an ultrasonic vibrator 15a mounted on the back side of the base 11. An elastic sheet 13 is further applied to the surface of the base 11. A mixture 16 of the lap debrises 9, which are a solid component of the lapping agent 7, with the abrasives 8 is mounted on the elastic sheet 13, and the inclined plate 12 and the mixture 16 are vibrated by the ultrasonic vibrating device 15. The frequency in the vibration is a resonance frequency calculated from the property values and the dimension of one substance constituting the mixture 16. COPYRIGHT: (C)2010,JPO&INPIT
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