| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-coherence interferometer which improves measurement efficiency by reducing the width of the scanning range of an optical path length difference. SOLUTION: The low-coherence interferometer includes light sources (1, 21) which have optical frequency widths for measuring a distance range as an object to be measured by a low-coherence interference method and generate wide-band modulated light which is intensity-modulated over the optical frequency direction, and optical systems (9, 18) which divide the wide-band modulated light generated by the light sources and guides the light to both an object (12) to be measured, and a reference object (15) and generates an interference signal by allowing measuring light from the object to be measured and reference light from the reference object to interfere with each other. COPYRIGHT: (C)2010,JPO&INPIT
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