发明名称 ADHESION BETWEEN AZO AND AG FOR THE BACK CONTACT IN TANDEM JUNCTION CELL BY METAL ALLOY
摘要 Methods of promoting adhesion between a reflective backing layer and a solar cell substrate are provided. The reflective backing layer is formed over a conductive metal oxide layer as an alloy using reflective and adhesive components, the adhesive components being present in levels generally below about 5 atomic percent. Techniques are disclosed for depositing varying the concentration of the reflective backing layer to localize the adhesive components in an adhesion region near the conductive metal oxide layer. Techniques are also disclosed for boosting bonding species in the conductive metal oxide layer to further enhance adhesion.
申请公布号 US2010132775(A1) 申请公布日期 2010.06.03
申请号 US20090398863 申请日期 2009.03.05
申请人 APPLIED MATERIALS, INC. 发明人 LE HIENMINH H.;TANNER DAVID
分类号 H01L31/04;B05D5/12;H01L31/18 主分类号 H01L31/04
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