发明名称 SOLUTE STABILIZATION OF SHEETS FORMED FROM A MELT
摘要 Embodiments of this apparatus and method introduce solutes into a sheet formed from a melt. A melt of a material is cooled and a sheet of the material is formed in the melt. A first fluid is introduced around the sheet at least partially while the sheet is formed. A second fluid also may be introduced. In one instance, use of the first fluid and second fluid may form a sheet that has two different solute concentrations.
申请公布号 WO2010039810(A3) 申请公布日期 2010.06.03
申请号 WO2009US58994 申请日期 2009.09.30
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES;SINCLAIR, FRANK 发明人 SINCLAIR, FRANK
分类号 H01L21/20;H01L31/042 主分类号 H01L21/20
代理机构 代理人
主权项
地址