发明名称 |
SOLUTE STABILIZATION OF SHEETS FORMED FROM A MELT |
摘要 |
Embodiments of this apparatus and method introduce solutes into a sheet formed from a melt. A melt of a material is cooled and a sheet of the material is formed in the melt. A first fluid is introduced around the sheet at least partially while the sheet is formed. A second fluid also may be introduced. In one instance, use of the first fluid and second fluid may form a sheet that has two different solute concentrations. |
申请公布号 |
WO2010039810(A3) |
申请公布日期 |
2010.06.03 |
申请号 |
WO2009US58994 |
申请日期 |
2009.09.30 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES;SINCLAIR, FRANK |
发明人 |
SINCLAIR, FRANK |
分类号 |
H01L21/20;H01L31/042 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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