发明名称 ENVIRONMENTAL BARRIER COATING FOR ORGANIC SEMICONDUCTOR DEVICES AND METHODS THEREOF
摘要 Improved environmental barrier coatings and improved organic semiconductor devices employing the improved environmental barrier coatings are disclosed herein. Methods of making and using the improved coatings and devices are also described. An improved environmental barrier coating generally includes a primary barrier layer, a secondary barrier layer disposed on the primary barrier layer, and a passivation layer disposed on the secondary barrier layer. The secondary barrier layer is formed using atomic layer deposition.
申请公布号 US2010132762(A1) 申请公布日期 2010.06.03
申请号 US20090629009 申请日期 2009.12.01
申请人 GEORGIA TECH RESEARCH CORPORATION 发明人 GRAHAM, JR. SAMUEL;KIPPELEN BERNARD;KIM NAMSU;DOMERCQ BENOIT
分类号 H01L31/042;B32B5/00;B32B9/04;B32B27/00;B32B27/30;B32B27/32;B32B27/38;B32B27/40;C23C16/44;C23C16/513;H01J1/62;H01L31/04;H01L51/05;H01L51/50;H01L51/56 主分类号 H01L31/042
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