发明名称 |
IMAGE FORMATION METHOD AND IMAGE FORMATION DEVICE |
摘要 |
<p>Provided are an image formation method and a charged particle beam device which can accurately measure a plurality of objects to be measured and contained in an image by executing a small number of scans. For this, a scan line is set in a direction other than the edge direction of a plurality of objects to be measured and contained in the image view field and the charged particle beam is scanned according to the setting. Provided also are a method and a device for setting a scan line direction in an appropriate direction not affected by the pattern deformation or the like. For this, a direction of disconnection between two patterns to be connected is obtained according to the deformation of the two patterns and a scan line is set in the direction determined according to the one or more directions of disconnection.</p> |
申请公布号 |
WO2010061516(A1) |
申请公布日期 |
2010.06.03 |
申请号 |
WO2009JP05374 |
申请日期 |
2009.10.15 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION;NISHIHARA, MAKOTO;YANG, KYOUNGMO;OYABU, YOSHIHIRO |
发明人 |
NISHIHARA, MAKOTO;YANG, KYOUNGMO;OYABU, YOSHIHIRO |
分类号 |
H01J37/22;G01B15/00;H01J37/147 |
主分类号 |
H01J37/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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