| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an immersion aligner for suppressing changes in temperature of the liquid in the gap between a final surface of a projection optical system and a substrate. <P>SOLUTION: The aligner includes a projection optical system for projecting the light from an original to a substrate, a substrate stage for holding and moving the substrate, a supply means for supplying liquid into the gap between the projection optical system and the substrate, and a recollecting means for recollecting the liquid from the gap. It exposes the substrate through the liquid filled in the gap. The aligner includes a storing means for storing information about calorific value coming into/out of the liquid filled in the gap or the information for estimating the calorific value, and a control means for controlling temperature of the liquid supplied by the supply means based on the information stored in the storing means. <P>COPYRIGHT: (C)2010,JPO&INPIT |
