| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a removing method capable of inexpensively reducing a concentration of gaseous contaminant within a clean room. <P>SOLUTION: In the method of removing the gaseous contaminant 44 within the clean room 10 including at least one purification area 12A and a return area 12B formed therein, hot air is introduced into the inside of the clean room 10 via an external air conditioner 34 including a filter 40 and a heater 42, the temperature inside the clean room 10 is made high to volatilize the gaseous contaminant 44, and the volatilized gaseous contaminant 44 and hot air are discharged to outside of the clean room 10. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
