| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for synthesizing and recovering sub-micro order or nanosized inorganic oxide hollow particles, particularly, spherical hollow submicron particles or spherical hollow nanoparticles of a metal oxide single crystal by a simple method. SOLUTION: The spherical hollow particles of the metal oxide single crystal are produced in a sputtering apparatus equipped with: a vacuum container containing a first electrode and an insulating plate surrounding a discharge space and the first electrode; a second electrode placed on the exterior surface of the insulating plate; and a gas-introduction part for introducing gas into the vacuum container, provided that the first electrode is a metal serving as a metal oxide source. The spherical hollow particles are produced by: applying fluctuating voltage between the first and second electrodes; feeding a gas containing≥0.1% oxygen through the gas-introduction part; and, in plasma, carrying out sputtering of the first electrode and an oxidation reaction of scattered first electrode metal atoms and oxygen within the same discharge space. Uniform particle size distribution can be achieved and cavity size/particle size ratio can be controlled by controlling discharge plasma and gas flow. COPYRIGHT: (C)2010,JPO&INPIT
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