| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin film capacitor which can enhance precision and stability of the capacitance in fabrication even if displacement occurs in the horizontal direction between the first interconnect and the second electrode. Ž<P>SOLUTION: The thin film capacitor 1 sequentially laminating a rectangular first electrode 2, a dielectric layer interposed between the first electrode 2 and the second electrode 4, and a rectangular second electrode 4 having an area larger than that of the first electrode 2 is provided with linear first interconnect 8 and a counter interconnect 10, wherein one ends of the first interconnect 8 and the counter interconnect 10 are connected with the first electrode 2 while facing each other in the plan view of the thin film capacitor 1, width of the first interconnect 8 is equalized to that of the counter interconnect 10, the length direction of the first interconnect 8 is aligned with that of the counter interconnect 10, and the other ends of the first interconnect 8 and the counter interconnect 10 are projected from the second electrode 4 in the plan view of the thin film capacitor 1. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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