| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately emit an electron beam to a desired position when emitting the electron beam to an object to be irradiated by an electromagnetic deflector formed by winding a coil around a core. Ž<P>SOLUTION: In this method for emitting the electron beam, the electron beam generated from an electron gun is deflected by passing a current to the coil of the electromagnetic deflector 2 having ferromagnetic in the core to irradiate the object to be irradiated with it. In the deflection range of the electron beam by the electromagnetic deflector 2, a process for passing a current to cause the maximum deflection and a process for passing a current to cause the minimum deflection are alternately repeated a plurality of times, and a desired current is passed to the coil after that. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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