| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a MEMS (micro electro mechanical system) switch capable of preventing an actuation failure based on a so-called sticking phenomenon. Ž<P>SOLUTION: The MEMS switch includes: at least two sets of parallel movable electrodes constituted with a predetermined space; a first movable contact connected to the movable electrode and moving therewith; a first stationary contact facing the first movable contact, and turning on/off by making/breaking with the first movable contact in accordance with the movement of the movable electrode; and first and second stationary electrodes formed at least in between the two sets of parallel movable contacts, and mutually disposed with the predetermined space. The movable electrode is operated by the voltage applied to the first and second stationary electrodes. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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