| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe unit capable of narrowing probe pitches, and assembling many probes with high precision. Ž<P>SOLUTION: This probe unit includes: a contact part having a plurality of probe bundles formed by laminating and fixing a plurality of plate-shaped conductive probes in a plate thickness direction, formed by laminating a plurality of probe bundles along a lamination direction of the probes, and having a contact with two circuit structures; a probe holder for holding the plurality of probe bundles, while applying a force in the lamination direction by clamping both ends in the lamination direction of the plurality of probe bundles in the contact part; and a rod-like member penetrating the contact part in the lamination direction, whose both ends are fixed to the probe holder. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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